| Fully automatic inspection and measurement microscope with UV capability
Features: 12”Wafer Capability
Superb Leica HCS optics with UV, DUV, Confocal
Ergonomic
Auto-focus in all imaging modes
Real-time visualization of sub micron structures down to feature sizes 0.13m
Dry (no immersion) 150x0.90 UV objective
White light confocal imaging
BF, DF, Interference contrast fluorescence
Objective Magnification 1.6x to 250x and magnification changer
Highest degree of automation
Wafer handlers available
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