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Fully automatic measurement and inspection microscope for routine inspection and defect analysis for the multimegabit chip generation.
Features: Ergonomic
8” wafer capability
Unique features of the INM200 , excellent for visualizing extremely fine detail.
Objective magnifications from 1.6x to 250x and magnification changer
Resolution down to 0.13um
Full automation
Wafer handlers available
Mask and Wafer Inspection
Laser Auto focus
RS232 Interface for remote control
Confocal, UV and DUV Systems
BF, DF, Interference contrast fluorescence
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