| Universal Inspection Microscope for Semiconductor Microelectronics Industry
Features:
8” Wafer capability
Simple, fast operation
Ergonomic
Automatic aperture diaphragm setting optimally matched to the objective in use
Completely new incident light axis with distinctly improved darkfield for maximum contrast and extremely good detail resolution
Trinocular tube with upright, laterally correct image and adjustable viewing from 0º to 35º
Confocal, UV and DUV Systems
Objective Magnification from 1.6x to 250x and magnification changer
BF, DF, Interference, contrast fluorescence
Wafer handlers available
Conforms class/clean room standards
|
